The need for high-performance, low-power, and low-cost systems for network transport and wireless communications is driving silicon technology toward higher speed, higher integration, and more functionality. Further more, this integration of RF and analog mixed-signal circuits into high-performance digital signal-processing (DSP) systems must be done with minimum cost overhead to be commercially viable. While some analog and RF designs have been attempted in mainstream digital-only complimentary metal-oxide semiconductor (CMOS) technologies, almost all designs that require stringent RF performance use bipolar or semiconductor technology. Silicon integrated circuit (IC) products that, at present, require modern bipolar or BiCMOS silicon technology in wired application space include the essential optical network (SONET) and synchronous digital hierarchy (SDH) operating at 10 Gb/s and higher. The viability of a mixed digital/analog. RF chip depends on the cost of making the silicon with the required elements; in practice, it must approximate the cost of the CMOS wafer, Cycle times for processing the wafer should not significantly exceed cycle times for a digital CMOS wafer. Yields of the SOC chip must be similar to those of a multi-chip implementation. Much of this article will examine process techniques that achieve the objectives of low cost, rapid cycle time, and solid yield..